230V Single Phase 6kw Ultrapure PFA Inline Heater For Semiconductor Fab

Overview

PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.

These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.

We has once again taken heating of high-purity liquids to a new level of performance and reliability.

We has once again taken heating of high purity liquids to a new level of performance and reliability. Heating liquids using high purity materials in a harsh environment requires special skills and knowledge that can only be gained from experience. For over 40 years, Our Engineers have been refining and improving the heated quartz bath and understand the critical needs of the Semiconductor and related industries. The sum of that knowledge has been incorporated into the PFA in-line heater to create products that not only perform, but simplify installation and maintenance as well. Exemplified by our long-standing ISO 9001 registration, our dedication to manufacturing process control assures that our customers receive uniformly high-quality products in a timely manner. We offers a wide range of standard and custom models to allow for easy integration into almost any application.

Features

• No O-Ring seals
• All wetted surfaces are high purity PFA
• PTFE housing for double containment
• Maximized watt density for performance
• Light weight construction
• Small foot print enabled by unique design
• Zero maintenance required
• PFA fluid path, wide chemistry compatibility
• High temperature capability 200°C+

Specifications

Heater	PFA In-line Chemical Heater
Wattages	1.5-12 kW
Process Chemistries	Dilute Hydrofluoric acids (DHF), Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more.
Max Operating Temperature	180°C (consult factory for higher temperatures)
Max Pressure	40 psi at 180°C
Voltages	200-400VAC, single or 3 phase model dependent

Other Applications

Precious Metal Deposition

Engineered to meet the most stringent requirements, accurate and reliable Heaters in Precious Metals' Deposition reduce materials waste. Low ripple Power Supplies provide clean and smooth direct current (DC), precision results while also saving on materials.

Products For General Metal Finishing

MOTS SINGLE - BOTTOM, DERATED

Derated, low watt density, L-shaped, bottom, metal over the side Immersion Heater. Single or Three phase. Three phase. 500-6000 watts, 120-480 volts.

MOTS TRIPLE - L SHAPED

L-shaped, bottom style metal over the side heater. Three phase. Single or three phase. 3000-36000 watts, 200-600 volts.

9HX SERIES

Low watt density, 9 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 3000-18000 watts, 208-600 volts.

6HX SERIES

Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts.

230V single phase inline heater

6kw ultrapure PFA heater

semiconductor fab inline heater

230V Single Phase 6kw Ultrapure PFA Inline Heater For Semiconductor Fab Images